JPH0139712Y2 - - Google Patents

Info

Publication number
JPH0139712Y2
JPH0139712Y2 JP1982176552U JP17655282U JPH0139712Y2 JP H0139712 Y2 JPH0139712 Y2 JP H0139712Y2 JP 1982176552 U JP1982176552 U JP 1982176552U JP 17655282 U JP17655282 U JP 17655282U JP H0139712 Y2 JPH0139712 Y2 JP H0139712Y2
Authority
JP
Japan
Prior art keywords
vapor deposition
substrate holder
evaporation source
filter
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982176552U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5980463U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17655282U priority Critical patent/JPS5980463U/ja
Publication of JPS5980463U publication Critical patent/JPS5980463U/ja
Application granted granted Critical
Publication of JPH0139712Y2 publication Critical patent/JPH0139712Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP17655282U 1982-11-24 1982-11-24 蒸着装置 Granted JPS5980463U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17655282U JPS5980463U (ja) 1982-11-24 1982-11-24 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17655282U JPS5980463U (ja) 1982-11-24 1982-11-24 蒸着装置

Publications (2)

Publication Number Publication Date
JPS5980463U JPS5980463U (ja) 1984-05-31
JPH0139712Y2 true JPH0139712Y2 (en]) 1989-11-29

Family

ID=30383819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17655282U Granted JPS5980463U (ja) 1982-11-24 1982-11-24 蒸着装置

Country Status (1)

Country Link
JP (1) JPS5980463U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742866A (en) * 1980-08-28 1982-03-10 Diesel Kiki Co Ltd Obstacle detector
NL8101695A (nl) * 1981-04-07 1982-11-01 Philips Nv Magneetbandcassetteapparaat.

Also Published As

Publication number Publication date
JPS5980463U (ja) 1984-05-31

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